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Manual Probe System

  • Manual Probe System α200CS α300CS

    Temperature characteristic evaluation from -60 °C to +350 °C

    ◎It is a Manual Probe System which supports wafer sizes of 8 inch and 12 inch respectively.

    ◎It has a compact shield to prevent dew condensation.

    ◎The compact shield provides a low noise environment.

    ◎With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air
    bearing design, reliable alignment is possible.

    ◎Z movement of the platen has coarse movement that can be operated with a lever, and fine movement
    that can be adjusted with micrometer.

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  • Manual Probe System α150 α200 α300

    α series manual probe system is easy to use and can be used for various measurement applications.

    ◎It is a Manual Probe System which supports wafer sizes of 6 inch, 8 inch and 12 inch respectively.

    ◎Chip fixing is possible.

    ◎With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air bearing design, reliable alignment is possible.

    ◎Z movement of the platen has coarse movement that can be operated with a lever, and fine movement that can be adjusted with micrometer.

    ◎It is user-friendly design.

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  • Manual Probe System α100

    4 inch Manual Probe System with for accurate and reliable IV/CV, RF and measurements
    ◎It is a compact prober which corresponds to the wafer size up to 4 inch.

    ◎With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air
    bearing design, reliable alignment is possible.

    ◎Z movement of the platen has coarse movement that can be operated with a lever, and fine movement
    that can be adjusted with micrometer.

    ◎It is user-friendly design.

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  • Compact Desktop Prober MBP-55

    Compact prober optimized for chip level IV/CV measurement

    ◎This prober supports sample sizes of up to 50 mm and is an integrated type even with a shield box.

    ◎It is capable of measuring low-level current IV and capacitance CV and RF.

    ◎The compact, light weight prober lets you carry it easily.

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