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Manual Probe System
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Manual Probe System α200CS α300CS
Temperature characteristic evaluation from -60 °C to +350 °C
◎It is a Manual Probe System which supports wafer sizes of 8 inch and 12 inch respectively.
◎It has a compact shield to prevent dew condensation.
◎The compact shield provides a low noise environment.
◎With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air
bearing design, reliable alignment is possible.◎Z movement of the platen has coarse movement that can be operated with a lever, and fine movement
that can be adjusted with micrometer.
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Manual Probe System α150 α200 α300
α series manual probe system is easy to use and can be used for various measurement applications.
◎It is a Manual Probe System which supports wafer sizes of 6 inch, 8 inch and 12 inch respectively.
◎Chip fixing is possible.
◎With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air bearing design, reliable alignment is possible.
◎Z movement of the platen has coarse movement that can be operated with a lever, and fine movement that can be adjusted with micrometer.
◎It is user-friendly design.
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Manual Probe System α100
4 inch Manual Probe System with for accurate and reliable IV/CV, RF and measurements
◎It is a compact prober which corresponds to the wafer size up to 4 inch.◎With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air
bearing design, reliable alignment is possible.◎Z movement of the platen has coarse movement that can be operated with a lever, and fine movement
that can be adjusted with micrometer.◎It is user-friendly design.
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Compact Desktop Prober MBP-55
Compact prober optimized for chip level IV/CV measurement
◎This prober supports sample sizes of up to 50 mm and is an integrated type even with a shield box.
◎It is capable of measuring low-level current IV and capacitance CV and RF.
◎The compact, light weight prober lets you carry it easily.