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Manual Probe System α100
4 inch Manual Probe System with for accurate and reliable IV/CV, RF and measurements
◎It is a compact prober which corresponds to the wafer size up to 4 inch.
◎With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air
bearing design, reliable alignment is possible.
◎Z movement of the platen has coarse movement that can be operated with a lever, and fine movement
that can be adjusted with micrometer.
◎It is user-friendly design.
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- Application
- Low level IV(fA)
- Low level CV(fF)
- RF measurement
- Various resistance measurements such as sheet
resistance - Temperature characteristic test
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- Option
- Hot chuck from room temperature to 300°C
- Triaxial connection to chuck
- Storage in a DarkBox
- Probe card (4.5 inch square PCB)
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- It is possible to select optical system
- Stereomicroscope (default)
- Trinocular microscope
- Zoom micro CCD camera
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- Examples of measuring instruments to be connected
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- Device Analyzers/Parameter analyzers
- Source Measure Units
- Curve Tracers
- Precision LCR meters
- Digital multimeters
- Impedance Analyzers
- Network Analyzers
- In addition, various measuring instruments of each company
| α100 | |
| Support wafer size | Chip level ~ 4 inch wafer |
| Stage travel range (Coarse) | X：100㎜ Y：110㎜ |
| Stage travel range (Fine) | X：±6.5㎜ Y：±6.5㎜ |
| Stage e travel | ±5° |
| Z Stage travel | 0ｰ0.3ｰ5㎜ |
| Z Stage fine travel | 5㎜ |
| Dimension | W320×H355×D490㎜ |
| Weight | 25㎏ |
