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Compact Desktop Prober MBP-55
Compact prober optimized for chip level IV/CV measurement
◎This prober supports sample sizes of up to 50 mm and is an integrated type even with a shield box.
◎It is capable of measuring low-level current IV and capacitance CV and RF.
◎The compact, light weight prober lets you carry it easily.
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- Application
- Low level IV (fA)
- Low level CV (fF)
- RF measurement
- Various resistance measurements such as for
sheet resistance - Temperature characteristic test
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- Option
- Hot chuck for room temperatures of up to 200°C
- Triaxial connection to chuck
- Interlock mechanism in conjunction with a measuring
instrument
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- It is possible to select optical system
- Stereomicroscope (defaul)
- Trinocular microscope
- Zoom micro CCD camera
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- Examples of measuring instruments to be connected
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- Device Analyzers/Parameter analyzers
- Source Measure Units
- Curve Tracers
- Precision LCR meters
- Digital multimeters
- Impedance Analyzers
- Network Analyzers
- In addition, various measuring instruments of each company
| MBP-55 | |
| Wafer chuck size | ～50mm |
| Stage travel range(Coarse) | ー |
| Stage travel range(Fine) | ー |
| Stage e travel | ー |
| Z Stage trave | ー |
| Z Stage fine travel | ー |
| Dimension | W630×H340×D380㎜ |
| Weight | 24㎏ |
