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Chuck system
 Hot Chuck system  
 <Hot chuck for 12inch probe station>



<Temperature distribution>

  Optimal for High-temperature measurement such as TDDB, EM 
APW hot chuck is configured by high uniformity hot plate and temperature controller. It enables the high thermo-control accuracy and temperature distribution. There are less heat strain, but optimal for malti probing as used the ceramic for chuck top.
Combination with α-series manual probe station enables
high temperature measurement and low noise probing. We also offer any idea for embarkation the hot chuck with customer's probe station. 
<Temperature controller>   <Example 1>
Combination with manual probe station
for 12inch TDDB measurement.

 
 Thermo Chuck  
         
Standard temperature range:-40 deg.C 〜 +120deg.C
Compatible with APW a-series probe station
For the test environment requiring negative up to
high temperature control.


<Example 2>
Mounted to LCD probe station  
*We decide the material of chuck top, colour, coat etc for each type of chuck by the details such as high voltage measurement, multisite probing and PCB material for each type of chuck.,  
  TEL 81-6-6838-3233 / FAX 81-6-6838-3234

 
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